TK

Toshifumi Kimba

EB Ebara: 1 patents #82 of 246Top 35%
📍 Yokohama, MO: #9 of 17 inventorsTop 55%
Overall (2004): #97,483 of 270,089Top 40%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6785010 Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Shunsuke Nakai 2004-08-31