Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829814 | Process of making an all-silicon microphone | John E. Freeman, William J. Baney, Timothy M. Betzner, Dan W. Chilcott, Timothy A. Vas +2 more | 2004-12-14 |
| 6828172 | Process for a monolithically-integrated micromachined sensor and circuit | Abhijeet V. Chavan, James Logsdon, Dan W. Chilcott, Robert K. Speck | 2004-12-07 |
| 6761070 | Microfabricated linear accelerometer | Seyed R. Zarabadi | 2004-07-13 |
| 6750152 | Method and apparatus for electrically testing and characterizing formation of microelectric features | Steven E. Staller, John E. Freeman, Troy Chase, Robert Lawrence Healton | 2004-06-15 |
| 6718826 | Balanced angular accelerometer | Seyed R. Zarabadi, Ian D. Jay, Jack D. Johnson, Tracy Adam Noll | 2004-04-13 |
| 6685844 | Deep reactive ion etching process and microelectromechanical devices formed thereby | David B. Rich | 2004-02-03 |