Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6816253 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Carola Blaesing-Bangert | 2004-11-09 |
| 6816263 | Interferometric measurement apparatus for wavelength calibration | Klaus Rinn | 2004-11-09 |
| 6778260 | Coordinate measuring stage and coordinate measuring instrument | Carola Blaesing-Bangert | 2004-08-17 |