Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6826511 | Method and apparatus for the determination of layer thicknesses | Hakon Mikkelsen, Horst Engel | 2004-11-30 |
| 6713746 | Arrangement and method for illuminating a specimen field in an optical instrument | Michael Veith, Uwe Graf | 2004-03-30 |
| 6696679 | Method for focusing of disk-shaped objects with patterned surfaces during imaging | Michael A. Graef, Uwe Graf, Guenter Hoffmann, Karl-Heinz Franke, Lutz Jakob | 2004-02-24 |