Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6789436 | Method and arrangement for transporting and inspecting semiconductor substrates | Frank Bernhardt, Knut Hiltawski | 2004-09-14 |
| 6736582 | Device for manipulating an object for loading and unloading a clean room | Andreas Mages, Alfred Schulz, Klaus Schultz | 2004-05-18 |