Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780083 | Apparatus and method for the chemical mechanical polishing of the surface of circular flat workpieces, in particular semi-conductor wafers | Ulrich Ising, Marc Reichmann | 2004-08-24 |
| 6770235 | Method for adjusting the shape of a low friction coating on a splined slip joint member | — | 2004-08-03 |
| 6767276 | Holder for flat workpieces, particularly semiconductor wafers | — | 2004-07-27 |
| 6709323 | Holder for flat workpieces, particularly semiconductor wafers | — | 2004-03-23 |