Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703316 | Method and system for processing substrate | Yoichi Inoue, Yoshihiko Sakashita, Katsumi Watanabe, Nobuyuki Kawakami, Takahiko Ishii +5 more | 2004-03-09 |
| 6691430 | High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus | Kimitsugu Saito, Yusuke Muraoka, Ryuji Kitakado, Takashi Miyake, Ikuo Mizobata | 2004-02-17 |