Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6832863 | Substrate treating apparatus and method | Kenji Sugimoto, Minobu Matsunaga, Katsushi Yoshioka, Kaoru Aoki, Moritaka Yano +4 more | 2004-12-21 |
| 6752544 | Developing apparatus and developing method | Masahiko Harumoto, Hiroshi Kobayashi, Minobu Matsunaga | 2004-06-22 |
| 6749351 | Apparatus for developing substrate | Masahiko Harumoto | 2004-06-15 |
| 6692165 | Substrate processing apparatus | Akiko Tanaka, Osamu Tamada, Masahiko Harumoto, Kayoko Nakano | 2004-02-17 |