Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821692 | Kind of thin films for microsystem technology and microstructuring and their use | Eugen Ermantraut, Johann Michael Köhler, Klaus Wohlfart, Stefan Wolfl | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821692 | Kind of thin films for microsystem technology and microstructuring and their use | Eugen Ermantraut, Johann Michael Köhler, Klaus Wohlfart, Stefan Wolfl | 2004-11-23 |