Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830650 | Wafer probe for measuring plasma and surface characteristics in plasma processing environments | Gregory A. Roche, Leonard Mahoney, Daniel Carter | 2004-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830650 | Wafer probe for measuring plasma and surface characteristics in plasma processing environments | Gregory A. Roche, Leonard Mahoney, Daniel Carter | 2004-12-14 |