Showing 1–10 of 10 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Mehran Nasser-Ghodsi | Kla-Tencor | 3 |
| 2 | Robert W. King | — | 2 |
| 3 | Joseph A. Maher | Federal Signal | 1 |
| 3 | Alice Chang | Bragel International | 1 |
| 3 | Peter Shepard | Cabot | 1 |
| 3 | Theodore P. Naugler | — | 1 |
| 3 | Ernst F. Scherer | Axcelis Technologies | 1 |
| 3 | David Edwards | GE | 1 |
| 3 | Luo Sun | New England Biolabs | 1 |
| 3 | Allan Brockenbrough | Comverse | 1 |
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