Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777145 | In-line focus monitor structure and method using top-down SEM | Wen-Zhan Zhou, Hui-Kow Lim, Teng-Hwee Ng, Goswami Indranil | 2004-08-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777145 | In-line focus monitor structure and method using top-down SEM | Wen-Zhan Zhou, Hui-Kow Lim, Teng-Hwee Ng, Goswami Indranil | 2004-08-17 |