Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689698 | Method for etching a silicided poly using fluorine-based reactive ion etching and sodium hydroxide based solution immersion | Song Zhigang, Shailesh Redkar, Hua Younan | 2004-02-10 |