Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828571 | Apparatus and methods of controlling surface charge and focus | Jan Lauber, Paul F. Petric, Ross W. Thompson, Jason Lim, Frank Fan +1 more | 2004-12-07 |
| 6774646 | Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanisms | Liqun Han | 2004-08-10 |