Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818912 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov | 2004-11-16 |