Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6785445 | Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe | Takako Yamaguchi, Yasuhisa Inao, Tomohiro Yamada | 2004-08-31 |
| 6720115 | Exposure method and exposure apparatus using near-field light and exposure mask | Yasuhisa Inao, Takako Yamaguchi | 2004-04-13 |
| 6721040 | Exposure method and apparatus using near field light | Kenji Saito, Yasuhisa Inao | 2004-04-13 |