Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6816233 | Mask having pattern areas whose transmission factors are different from each other | — | 2004-11-09 |
| 6806477 | Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same | Kenji Saito, Toshihiko Tsuji | 2004-10-19 |