Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836031 | Linear motor and exposure apparatus using the same | Kazuhito Outuka, Yoshikazu Miyajima | 2004-12-28 |
| 6810298 | Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method | — | 2004-10-26 |
| 6791670 | Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Yoshikazu Miyajima, Kazuhito Outuka | 2004-09-14 |