Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812164 | Method and apparatus for ionization film formation | Masahiro Kanai, Atsushi Koike, Katsunori Oya | 2004-11-02 |
| 6787478 | Method of forming deposited film | Atsushi Koike, Masahiro Kanai | 2004-09-07 |