Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6785583 | Management system and apparatus, method therefor, and device manufacturing method | Satoru Oishi, Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto | 2004-08-31 |
| 6770408 | Dust particle inspection method for X-ray mask | Kenji Itoga | 2004-08-03 |