Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823734 | Electrostatic spring softening in redundant degree of freedom resonators | Ken J. Hayworth, Todd E. Humphreys, A. Dorian Challoner | 2004-11-30 |
| 6796179 | Split-resonator integrated-post MEMS gyroscope | Youngsam Bae, Ken J. Hayworth | 2004-09-28 |