Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6747338 | Composite dielectric with improved etch selectivity for high voltage MEMS structures | Thomas Kieran Nunan, Denis O'Kane, James S. Sellars | 2004-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6747338 | Composite dielectric with improved etch selectivity for high voltage MEMS structures | Thomas Kieran Nunan, Denis O'Kane, James S. Sellars | 2004-06-08 |