Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804025 | Calibration data preparing system | Masahiro Nishihara | 2004-10-12 |
| 6719876 | Internal electrode type plasma processing apparatus and plasma processing method | Tomoko Takagi | 2004-04-13 |
| 6714211 | Method and equipment for monitor calibration and storage medium storing a program for executing the method | Yasunari Yoshida, Masaaki Hibino, Koji Kobayakawa, Kiyotaka Ohara, Masaaki Hori | 2004-03-30 |