Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818566 | Thermal activation of fluorine for use in a semiconductor chamber | Noel James Leeson, Peter Harold Buckley, Richard Hogle | 2004-11-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818566 | Thermal activation of fluorine for use in a semiconductor chamber | Noel James Leeson, Peter Harold Buckley, Richard Hogle | 2004-11-16 |