Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6760144 | Articulated MEMS electrostatic rotary actuator | Edward A. Hill, Ramaswamy Mahadevan, Vijayakumar R. Dhuler | 2004-07-06 |
| 6757093 | MEMS reflectors having tail portions that extend inside a recess and head portions that extend outside the recess and methods of forming same | Vivek Agrawal | 2004-06-29 |