Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776881 | Magnetron atomization source and method of use thereof | Pius Gruenenfelder, Hans Hirscher, Urs Schwendener | 2004-08-17 |
| 6682637 | Magnetron sputter source | Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Pius Grunenfelder, Stanislav Kadlec +1 more | 2004-01-27 |
| 6679977 | Method of producing flat panels | Pius Grunenfelder, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer | 2004-01-20 |