Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730365 | Method of thin film deposition under reactive conditions with RF or pulsed DC plasma at the substrate holder | Carlo Misiano | 2004-05-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730365 | Method of thin film deposition under reactive conditions with RF or pulsed DC plasma at the substrate holder | Carlo Misiano | 2004-05-04 |