Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6782843 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | Daniel Richardson | 2004-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6782843 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | Daniel Richardson | 2004-08-31 |