Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6799152 | Critical dimension statistical process control in semiconductor fabrication | Chih-Ping Chen, Shao-Chung Hsu, De Chuan Liu, Jung-Kuei Lu, Cheng-Yi Lin +3 more | 2004-09-28 |