Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831285 | Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby | Edwin Johan Buis, Robrecht De Weerdt | 2004-12-14 |
| 6717296 | Lithographic apparatus and motor for use in the apparatus | Jan Van Eijk, Angelo Oscar Peter De Klerk, Harmen Klaas Van Der Schoot | 2004-04-06 |