Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828542 | System and method for lithography process monitoring and control | R. Fabian W. Pease, Xun Chen | 2004-12-07 |
| 6820028 | Method and apparatus for monitoring integrated circuit fabrication | Xun Chen | 2004-11-16 |
| 6806456 | System and method for lithography process monitoring and control | R. Fabian W. Pease, Xun Chen | 2004-10-19 |
| 6807503 | Method and apparatus for monitoring integrated circuit fabrication | Xun Chen | 2004-10-19 |
| 6803554 | System and method for lithography process monitoring and control | R. Fabian W. Pease, Xun Chen | 2004-10-12 |
| 6748103 | Mechanisms for making and inspecting reticles | Lance Glasser, Shauh-Teh Juang, David Alles, James Wiley | 2004-06-08 |