Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809797 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Adrianus Franciscus Petrus Engelen, Hugo Augustinus Joseph Cramer, Jozef Maria Finders, Carsten Kohler | 2004-10-26 |
| 6777139 | Method of calibration of a lithographic apparatus, mask for use in calibration of lithographic apparatus, lithographic apparatus, device manufacturing method, device manufactured thereby | — | 2004-08-17 |