Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835510 | Hybrid phase-shift mask | Roger Caldwell, Thomas Laidig, Kurt E. Wampler | 2004-12-28 |
| 6792591 | Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs | Xuelong Shi, Duan-Fu Stephen Hsu | 2004-09-14 |