Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831768 | Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography | Jason Hintersteiner, Azat Latypov, Gerald Volpe | 2004-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831768 | Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography | Jason Hintersteiner, Azat Latypov, Gerald Volpe | 2004-12-14 |