Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720259 | Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition | Ana R. Londergan, Sasangan Ramanathan, Thomas E. Seidel | 2004-04-13 |