Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6726954 | Method and system for forming copper thin film | Minjuan Zhang, Toshiaki Sasaki, Susumu Akiyama, Atsushi Sekiguchi | 2004-04-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6726954 | Method and system for forming copper thin film | Minjuan Zhang, Toshiaki Sasaki, Susumu Akiyama, Atsushi Sekiguchi | 2004-04-27 |