Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805749 | Method and apparatus for supporting a semiconductor wafer during processing | Frank Hunssen | 2004-10-19 |
| 6770851 | Method and apparatus for the treatment of substrates | Vladimir Kuznetsov, Arjen Storm, Herbert Terhorst | 2004-08-03 |