Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825051 | Plasma etch resistant coating and process | Fred AmRhein | 2004-11-30 |
| 6806145 | Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer | Suvi Haukka, Eric James Shero, Jan Willem Hub Maes, Marko Tuominen | 2004-10-19 |
| 6797617 | Reduced cross-contamination between chambers in a semiconductor processing tool | Eric James Shero, Olli Jylhä | 2004-09-28 |