Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825475 | Deflection method and system for use in a charged particle beam column | Igor Petrov, Igor Krivts, Pavel Adamec | 2004-11-30 |
| 6674075 | Charged particle beam apparatus and method for inspecting samples | Igor Petrov | 2004-01-06 |