Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794664 | Umbilical cord facilities connection for an ion beam implanter | Kevin T. Ryan | 2004-09-21 |
| 6740894 | Adjustable implantation angle workpiece support structure for an ion beam implanter utilizing a linear scan motor | — | 2004-05-25 |
| 6690986 | Method of detecting the position of a wafer | Ian R. Joyce, James Biddle, James Victor Edwards | 2004-02-10 |
| 6679675 | Method and apparatus for processing wafers | Keith Relleen, John Ruffell | 2004-01-20 |