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Oliver Kienzle

CG Carl Zeiss Smt Gmbh: 1 patents #14 of 88Top 20%
Overall (2004): #143,904 of 270,089Top 55%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6756599 Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same 2004-06-29