Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746727 | Metal to ILD adhesion improvement by reactive sputtering | Chi-Hing Choi | 2004-06-08 |
| 6730598 | Integration of annealing capability into metal deposition or CMP tool | — | 2004-05-04 |