Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689221 | Cooling gas delivery system for a rotatable semiconductor substrate support assembly | Theodore H. Smick | 2004-02-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689221 | Cooling gas delivery system for a rotatable semiconductor substrate support assembly | Theodore H. Smick | 2004-02-10 |