Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808748 | Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology | M. Ziaul Karim, Anchuan Wang | 2004-10-26 |
| 6802944 | High density plasma CVD process for gapfill into high aspect ratio features | Farhan Ahmad, Michael Awdshiew, Alok Jain | 2004-10-12 |