Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780294 | Shield assembly for substrate processing chamber | Robert B. Hixson, Gary Groshong, David B. Jordan | 2004-08-24 |
| 6736946 | Physical vapor deposition apparatus with modified shutter disk and cover ring | Robert B. Hixson, Jason Lee Monfort, Gary Groshong | 2004-05-18 |