Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794298 | CF4+H2O plasma ashing for reduction of contact/via resistance | Jeffrey A. Shields, Lu You | 2004-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794298 | CF4+H2O plasma ashing for reduction of contact/via resistance | Jeffrey A. Shields, Lu You | 2004-09-21 |