Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746616 | Method and apparatus for providing etch uniformity using zoned temperature control | H. Jim Fulford | 2004-06-08 |
| 6722942 | Chemical mechanical polishing with electrochemical control | Christopher H. Lansford, Bradley J. Yellitz | 2004-04-20 |
| 6689258 | Electrochemically generated reactants for chemical mechanical planarization | Christopher H. Lansford | 2004-02-10 |