Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791697 | Scatterometry structure with embedded ring oscillator, and methods of using same | — | 2004-09-14 |
| 6767835 | Method of making a shaped gate electrode structure, and device comprising same | David E. Brown | 2004-07-27 |
| 6742168 | Method and structure for calibrating scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device | — | 2004-05-25 |