Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6816252 | Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry | — | 2004-11-09 |
| 6795193 | Scatterometer including an internal calibration system | — | 2004-09-21 |
| 6767680 | Semiconductor structure and method for determining critical dimensions and overlay error | — | 2004-07-27 |
| 6765282 | Semiconductor structure and method for determining critical dimensions and overlay error | — | 2004-07-20 |
| 6724096 | Die corner alignment structure | Thomas Werner, Gunter Grasshoff, Carsten Hartig | 2004-04-20 |