Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6792889 | Plasma processing apparatus and method capable of performing uniform plasma treatment by control of excitation power | Tadahiro Ohmi | 2004-09-21 |
| 6795796 | Performance evaluation method for plasma processing apparatus for continuously maintaining a desired performance level | Tadahiro Ohmi | 2004-09-21 |
| 6750614 | Plasma processing apparatus capable of performing uniform plasma treatment by preventing drift in plasma discharge current | Tadahiro Ohmi | 2004-06-15 |
| 6714833 | Performance evaluation method for plasma processing apparatus | Tadahiro Ohmi | 2004-03-30 |
| 6701202 | Performance evaluation method for plasma processing apparatus | Tadahiro Ohmi | 2004-03-02 |